Industry Insights
03 Jan 2026
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Rigaku Releases XTRAIA MF-3400 Measurement Instrument for Next-Generation Semiconductors
Rigaku Holdings Corporation (Headquarters: Akishima, Tokyo; CEO: Jun Kawakami; hereinafter referred to as "Rigaku") group company Rigaku Corporation is a global partner for X-ray analysis system solutions. The company has recently officially launched the XTRAIA MF-3400 measurement instrument, specifically designed for measuring thickness and composition of wafers in semiconductor manufacturing processes. The XTRAIA MF-3400 enables high-precision evaluation of critical materials required for mass production of next-generation memory chips and high-speed AI devices, significantly enhancing productivity in the rapidly growing semiconductor market.
With the continuous expansion of generative artificial intelligence and data centers, demand is increasing for high-performance, energy-efficient semiconductors capable of processing massive amounts of data. As a result, semiconductor structures are becoming increasingly complex, refined, and three-dimensional, with individual chips integrating hundreds of billions of microscopic electronic components.
To achieve stable mass production of such advanced devices, non-destructive measurement capabilities and insulating metal thin-film technologies with nanometer-level precision are essential. To meet this need, Rigaku has further advanced its decades-long expertise in X-ray technology, successfully developing the XTRAIA MF-3400 measurement system. New features include support for measuring molybdenum—an emerging material receiving growing attention.
Main Features of XTRAIA MF-3400
- Measurement capacity doubled compared to previous models
By doubling X-ray dosage and integrating a new transport system, the number of wafers measured per hour is significantly increased. - Nanometer-precision non-destructive measurement
In narrow areas as small as 50 micrometers—narrower than a human hair—the XTRAIA MF-3400 measures thin-film thickness with sub-nanometer precision, finer than the diameter of a single atom. - Multi-analysis capability in a single device
The XTRAIA MF-3400 integrates three X-ray analytical functions: X-ray fluorescence analysis, X-ray reflectometry, and X-ray diffraction analysis. Users can register optimal measurement conditions in preset recipes based on specific inspection targets such as ultra-thin film structure, thickness, or crystallinity, enabling automated inspection workflows.
Performance Record and Future Prospects
KIOXIA Corporation and KIOXIA Iwate Corporation have decided to deploy the XTRAIA MF-3400 in their 3D NAND flash memory1 mass production lines. The instrument is also expected to be used in manufacturing next-generation memory devices requiring high storage capacity and high data transfer rates, which are approaching mass production. Additionally, manufacturers of dynamic random-access memory (DRAM)2 and logic semiconductors3 are also anticipated to adopt the XTRAIA MF-3400. Combined with sales performance of earlier models, Rigaku forecasts net sales of this product series will exceed 6 billion yen in fiscal year 2026.
The XTRAIA MF-3400 offers various customizable optional modules, allowing flexible configuration tailored to different application scenarios. This modular design enables manufacturers to build measurement environments optimally suited to their production processes. Leveraging its versatility and scalability, Rigaku aims to expand into applications involving new materials and processes, targeting sustainable annual growth of 20% for its two main product lines from fiscal year 2027 onward.
1. A storage medium using a 3D structure to achieve high capacity, high speed, and low power consumption
2. A volatile main memory for temporary data storage, characterized primarily by high-speed operation
3. Semiconductors used for computing, control, and other processing functions
Product Details
About the Rigaku Group
Since its founding in 1951, the Rigaku Group's engineering professionals have dedicated themselves to benefiting society through cutting-edge technologies, particularly in core fields such as X-ray and thermal analysis. With a presence in 136 countries and regions and approximately 2,000 employees across nine global subsidiaries, Rigaku serves as a solutions partner for industrial and research analysis institutions. Overseas sales account for about 70% of total revenue, while maintaining a very high market share in Japan. Growing together with customers, Rigaku has expanded its application areas from semiconductors, electronic materials, batteries, environment, resources, energy, and life sciences into other high-tech domains, driving innovation toward "improving our world by advancing new perspectives."
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